Surface electromigration of Cu overlayer on Si.

First-principles calculations of Cu adsorption on an H-terminated Si surface

Rights: © 2007 American Physical Society (APS). This is the accepted version of the following article: Foster, A. S. & Gosálvez, M. A. & Hynninen, T. & Nieminen, Risto M. & Sato, K. 2007. First-principles calculations of Cu adsorption on an H-terminated Si surface. Physical Review B. Volume 76, Issue 7. 075315/1-8. ISSN 1550-235X (electronic). DOI: 10.1103/physrevb.76.075315, which has been pub...

Surface morphology and electric conductivity of epitaxial Cu(100) films grown on H-terminated Si(100)

We have investigated the crystal structure, surface morphology, and electrical conductance of Cu films grown on H-terminated Si~100!. The films were grown by thermal evaporation at 10 Torr, at deposition rates from 0.1 to 3.5 nm/s and at substrate temperatures from room temperature up to 200 °C. Typical film thicknesses were ;100 nm. Epitaxial growth was verified by x-ray diffraction for films ...

Electromigration-induced propagation of nonlinear surface waves.

Due to the effects of surface electromigration, waves can propagate over the free surface of a current-carrying metallic or semiconducting film of thickness h(0). In this paper, waves of finite amplitude, and slow modulations of these waves, are studied. Periodic wave trains of finite amplitude are found, as well as their dispersion relation. If the film material is isotropic, a wave train with...

Directional electromigration-enhanced interdiffususion in the Cu-Ni system

Microtexture and electromigration-induced drift in electroplated damascene Cu

In this work, the electromigration ~EM! performance of electroplated damascene Cu is investigated by drift experiments on Blech-type test structures in both polycrystalline and bamboo microstructures. For the first, microtexture data were obtained from electron backscatter diffraction as well. While both bonding areas and 10 mm wide lines were found to have a predominantly random grain orientat...